|
Megasonic Sweeping has many benefits over traditional megasonics as it eliminates damage caused from the uneven power surges normally present in megasonic tanks. These surges are evident by observing the ridges and fogging that are present on the liquid surface. Where there are surges the power is extremely high, away from the ridges there is little power and little cleaning.
Megasonic wafer cleaning without damage is Still Possible
Only Megasonic Sweeping offers balanced power distribution in a Megasonic cleaning tank. By sweeping the transducer array, each PZT is excited at its optimum resonant frequency, resulting in the perfect Megasonic cleaning process.
Proven Results and Benefits
 |
Without sweep the PZT with frequency closest to the Megasonic generator frequency creates a surge and a fountain effect. Megasonic is created from the vertical thickness mode. The power that creates the surge burns sensitive parts. For every fountain another PZT is not getting enough power. |
 |
Sweeping at a predetermined rate causes each PZT to fire at its optimum natural resonant frequency. The cleaning energy produced is perfectly uniform and is distributed throughout the entire vessel. Cleaning is optimized allowing for faster process cycles with greater yield andthroughput. Exposure time to cleaning energy can be reduced, avoiding any possible adverse effect on sensitive parts or product features. |
- Each PZT receives the exact amount of megasonic energy for the exact amount of time.
- Each PZT is fired at its resonant (optimum) frequency in continuous high speed cycles.
- The life of the PZT's are also greatly extended as a result of the sweeping process.
- Hot-spots and uneven cleaning are eliminated in batch cleaning processes.
- Another benefit is that masking is substantially reduced.
1MHz Megasonic Sweeping Generator |
| Only Megasonic Sweeping offers balanced power distribution in a Megasonic cleaning tank. By sweeping the transducer array, each PZT is excited at its optimum resonant frequency, resulting in the perfect Megasonic cleaning process. |
| |
 |
Generator Frequency : |
1MHz |
| |
|
| Generator Power : |
300 watts average maximum power per module
350 watts line power consumption at 200/240 volts |
| |
|
| Generator Size : |
2,000-Watt Model: 17.5” L-R x 16.0” F-B x 9.25” High
800-Watt Model: 9.25” L-R x 16.0” F-B x 9.25” High |
| |
|
| Misc. Features : |
- Full Digital operation with input/output monitoring/control from lighted front panel or remotely via 25-Pin D-Sub connection to PLC controller
- Automatic transducer center frequency tuning with automatic transducer center frequency tracking
- Sweep width and rate both adjustable to optimize cleaning performance
- DDS with Microprocessor controlled digital design
- Digital operation from front panel or remotely via 25-Pin D-Sub connection with input/output monitoring/control of RF-on/off and power level
- Monitoring and shut-down protection for over/under line voltage and current and over-temperature
- RFI filter (in compliance with FCC regulations)
- Three (3) Year Warranty on Generator Module
|
| |
|
| Generator Case: |
Case for Megasonic Sweeping Modules including Axial cooling fan, main power switch and cord |
| |
|
| Power requirements : |
200-240 volts 50/60 Hz, 1 phase 3.0 amps
-OR-
3 X 400 VAC (3 Phase + N + E) |
| |
|
470KHz Megasonic Sweeping Generator |
| Only Megasonic Sweeping offers balanced power distribution in a Megasonic cleaning tank. By sweeping the transducer array, each PZT is excited at its optimum resonant frequency, resulting in the perfect Megasonic cleaning process. |
| |
|
Generator Frequency : |
470KHz |
| |
|
| Generator Power : |
400 watts average maximum power per module
450 watts line power consumption at 200/240 volts |
| |
|
| Misc. Features : |
- Patented sweeping frequency around the base center frequency
- Automatic transducer center frequency tuning with automatic transducer center frequency tracking
- Sweep width and rate both adjustable to optimize cleaning performance
- DDS with Microprocessor controlled digital design
- Digital operation from front panel or remotely via 25-Pin D-Sub connection with input/output monitoring/control of RF-on/off and power level
- Monitoring and shut-down protection for over/under line voltage and current and over-temperature
- RFI filter (in compliance with FCC regulations)
- Three (3) Year Warranty on Generator Module
|
| |
|
| Generator Case: |
Case for Megasonic Sweeping Modules including Axial cooling fan, main power switch and cord |
| |
|
| Power requirements : |
200-240 volts 50/60 Hz, 1 phase 3.0 amps
-OR-
3 X 400 VAC (3 Phase + N + E) |
| |
|
|
|
|
|
|
